Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer

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Publication Details

Journal
Sensors and Materials
Published
2025-06-09
DOI
https://doi.org/10.18494/sam5617
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
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article

Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer

Chu Manh Hoang, Nguyen Van Cuong, Nguyễn Văn Dương, Bui Van Cuong
Sensors and Materials
Advanced MEMS and NEMS Technologies
article

Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer

Chu Manh Hoang, Nguyen Van Cuong, Nguyễn Văn Dương, Bui Van Cuong
article en

Abstract

No abstract available for this paper.
Sensors and MaterialsVol. 37(6)
Openalex Percentile: Top 89%
Advanced MEMS and NEMS Technologies
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Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer — Chu Manh Hoang, Nguyen Van Cuong, et al. · Sensors and Materials (2025) | TGRS Research Map | TGRS