Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer
Authors
- Chu Manh Hoang (ORCID: https://orcid.org/0000-0001-5808-8736)
- Nguyen Van Cuong (ORCID: https://orcid.org/0000-0001-8877-7735)
- Nguyễn Văn Dương
- Bui Van Cuong
Publication Details
- Journal
- Sensors and Materials
- Published
- 2025-06-09
- DOI
- https://doi.org/10.18494/sam5617
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00