Micromachined Piezoresistive Pressure Sensor With High Robustness

Micromachined piezoresistive pressure sensors are extensively utilized in various industrial applications. However, they often suffer from challenges such as temperature-induced resistance fluctuations and leakage currents, which can compromise measurement accuracy and long-term stability. This paper introduces a novel sensor design aimed at improving temperature stability and minimizing leakage currents. The proposed design incorporates a platinum (Pt) resistor on the chip surface for real-time temperature compensation and an isolation ring to effectively reduce leakage currents. Fabricated using a standard micro-electro-mechanical systems (MEMS) process, the pressure sensor was subjected to experimental evaluation. The results reveal that the fabricated sensor exhibits exceptional durability, stability, and resilience under a variety of environmental stresses, including temperature fluctuations, mechanical shocks, vibrations, and humidity exposure. These characteristics make the sensor a robust solution for demanding industrial applications that require high precision and long-term stability. Based on the experimental data, the sensor is expected to perform robustly in diverse conditions, with an operational lifespan exceeding 10 years.