Principle and application of fabricating flexible film thermocouple by physical vapor deposition (PVD)

Abstract To adapt to the development of flexible electronic technology and intelligent wearable devices, the demand for verifying flexible thin film thermocouples is becoming increasingly prominent. The physical meteorological deposition method is a commonly used key technology for flexible coating. The use of the physical meteorological deposition method to prepare flexible thin film thermocouples has the characteristics of low cost, high efficiency, and high reliability. By introducing the principle of physical meteorological deposition method for preparing flexible thin film thermocouples and conducting verification experiments, the maximum temperature deviation of the prepared flexible thermocouple thin film is ± 0.3 °C, which can meet the temperature measurement needs of daily flexible temperature measurement thin films.