Optical Design of an Ambient Pressure / UHV X-ray Photoelectron Spectroscopy Beamline at the Taiwan Photon Source

Abstract An ambient pressure / UHV X-ray photoelectron spectroscopy beamline is designed to study critical physical and chemical processes, including catalysis, energy storage, and environmental science. The source of the beamline is from an elliptically polarizing undulator to cover the photon energy range from 200 to 3000 eV. In this optical design, the grating paired with the active mirror is applied to improve the impact of the optical aberrations and keep the light at the exit slit in focus. All parameters of optical components at the beamline are verified by a ray-tracing method and the expected performances are discussed.

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Publication Details

Journal
Journal of Physics Conference Series
Published
2025-05-01
DOI
https://doi.org/10.1088/1742-6596/3010/1/012050
Primary Topic
Advancements in Photolithography Techniques
Type
article
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article

Optical Design of an Ambient Pressure / UHV X-ray Photoelectron Spectroscopy Beamline at the Taiwan Photon Source

Shang‐Hsien Hsieh, Ming-Ying Hsu, Chien‐Te Chen, Yi-Jr Su et al.
Journal of Physics Conference Series
Advancements in Photolithography Techniques
article

Optical Design of an Ambient Pressure / UHV X-ray Photoelectron Spectroscopy Beamline at the Taiwan Photon Source

Shang‐Hsien Hsieh, Ming-Ying Hsu, Chien‐Te Chen, Yi-Jr Su, Chia‐Hsin Wang, Chia‐Hao Chen, Ming-Han Lee, Bo-Hong Liu
article en

Abstract

Abstract An ambient pressure / UHV X-ray photoelectron spectroscopy beamline is designed to study critical physical and chemical processes, including catalysis, energy storage, and environmental science. The source of the beamline is from an elliptically polarizing undulator to cover the photon energy range from 200 to 3000 eV. In this optical design, the grating paired with the active mirror is applied to improve the impact of the optical aberrations and keep the light at the exit slit in focus. All parameters of optical components at the beamline are verified by a ray-tracing method and the expected performances are discussed.

Journal of Physics Conference SeriesVol. 3010(1)
National Synchrotron Radiation Research Center (TW)
Openalex Percentile: Top 89%
Advancements in Photolithography Techniques
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