Development of Fluorescent Diamond Sensors for EUV/Soft X-ray Imaging
Abstract This study highlights the use of fluorescent diamonds (FDs) with nitrogen-vacancy (NV) center as scintillators for imaging in the extreme ultraviolet (EUV) to soft X-ray range. The FDs exhibit a wide absorption band spanning from 80 to 1200 eV, while maintaining consistent emission spectra. Under synchrotron radiation excitation, the FDs emit orange fluorescence and demonstrate exceptional resistance to radiation. These results indicate that FDs could be highly valuable for EUV lithography and soft X-ray detection applications.
Authors
- Yu-Hsin Yang
- Yin‐Yu Lee
- Gung-Chian Yin (ORCID: https://orcid.org/0000-0001-5370-4624)
- Tzu-Ping Huang
- Chun-Jen Weng (ORCID: https://orcid.org/0000-0003-1489-5194)
- Chi-Hung Hwang (ORCID: https://orcid.org/0000-0003-4492-8647)
- Yuen-Yung Hui
- Guo-Hao Lu
- Wen-Tse Hsiao (ORCID: https://orcid.org/0000-0003-4085-7351)
- Teng‐I Yang (ORCID: https://orcid.org/0000-0003-2653-3895)
- Yu‐Chan Lin
- M. Y. Hsu
- H. P. Chang
- Hung‐Wei Shiu
- Ya-Ting Kang
- Yi-Jr Su
Institutions
- National Taiwan Normal University (TW)
- National Chung Cheng University (TW)
- National Taiwan University (TW)
- National Synchrotron Radiation Research Center (TW)
- Institute of Atomic and Molecular Sciences, Academia Sinica (TW)
Publication Details
- Journal
- Journal of Physics Conference Series
- Published
- 2025-05-01
- DOI
- https://doi.org/10.1088/1742-6596/3010/1/012169
- Primary Topic
- Diamond and Carbon-based Materials Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00