The Ultra-high Spectral Resolving Power Soft X-ray Monochromator Design and the Its Key Techniques Development at HALF

Abstract Hefei Advanced Light Facility (HALF) is a diffraction limited synchrotron radiation (DLSR) light source. The Test Beamline (BL10) is dedicated to key techniques R&D for HALF beamline engineering with at-wavelength optical metrology, wavefront sensing, thermal deformation measurement, high stability mechanical parts tests. An ultra-high spectral resolving power (E/ΔE = 10 5 @1000 eV) monochromator with energy ranging from 250 eV to 2000 eV is designed for the beamline. This presentation will give the beamline optical design and the challenges for the ultra-high spectral resolving power monochromator construction. It gives the detailed specifications and requirements for optical components and monochromator’s mechanical system.