The standardized horizontal deflecting mirror manipulator for Hefei Advanced Light Facility

Abstract Hefei Advanced Light Facility (HALF) is a diffraction-limited synchrotron radiation light source in the soft X-ray range. It provides a powerful tool for nano-focusing, ultra-high spectral resolving power experiments and applications. To fully utilize the source characteristics, beamline mirrors, and manipulators require high accuracy and high stability. At HALF beamlines, most of the first mirror is designed to deflect the photons horizontally to reduce their slope error effects on the spatial and spectral resolution. In this paper, a standardized mirror manipulator for a 400 mm long mirror (M1) is proposed for testing and evaluation, which adopts a liquid-metal-bath cooling method to cope with the challenge of high heat load, and the deterministic design method is used to meet the requirement of high stability. A three-point spherical support with a six-point mirror gravity compensation clamping structure is developed to meet the requirements of ultra-high vacuum, mechanical, and thermal stability of optical elements simultaneously. Prototype design and preliminary test results are presented.