Inline Non-Contacting Measurement of Effective Work Function
An inline method for effective work function measurement using a non-contacting Kelvin probe-based instrument shall enable engineers to quickly reach an optimal metal gate process condition that shall result in the desired Vt value, thus to effectively accelerate the development progress. In this paper, the theory of this method and the mechanism of the instrument are discussed, accompanied by some example measurement results as well.
Authors
- Heng Zou (ORCID: https://orcid.org/0000-0002-3683-7916)
- Thye Chong Loy (ORCID: https://orcid.org/0000-0001-8931-3780)
- Heming Li (ORCID: https://orcid.org/0000-0002-2982-7533)
- Dmitriy Marinskiy
- Zheng Zou
- He Chen (ORCID: https://orcid.org/0000-0002-6805-9290)
- Shannon Yeoh
Institutions
- Taiwan Semiconductor Manufacturing Company (China) (CN)
Publication Details
- Published
- 2025-03-24
- DOI
- https://doi.org/10.1109/cstic64481.2025.11017825
- Primary Topic
- Iterative Learning Control Systems
- Type
- article
- Field-Weighted Citation Impact
- 0.00