Monitoring & Testing of Nanoparticle Contaminants

It will be described semiconductor and its supply chain for particle pollutant detection down to 3nm or 9nm, including several segments:1. What's the detection limit among OPC, CPC and Raman optics for the particle pollutant testing esp. in the semiconduction industry;2. What are the commercial particles and particle precursors equipment by using NCPC technology in the liquid or wet chemicals;3. What's the minimum detection size in this periodƒ And what are the liquid substance or chemicals testedƒ4. Meanwhile, what's the different among OPC, CPC and Raman or othersƒ5. To describe the comparison testing data to depict how to detect CMP slurry, hydrochloric acid and sulfuric acid.