A Design Stucture of Three Axis MEMS Accelerometer with Low Cross-Axis Sensitivity
This paper presents the design and characterization of a three axis capacitive MEMS accelerometer comprised of two proof masses. By using FEM (Finite Element Method), we analyzed the influence of spring beams on the performance of the accelerometer, especially the cross-axis sensitivity. Critical parameters of spring beams have been found. And differentially detecting capacitors are used to achieve low cross-axis sensitivity. All cross-axis sensitivities are lower than 0.05%. The geometric dimensions of each proof-mass are selected at 1×0.9×0.05 mm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup>.
Authors
- Shaofeng Yu (ORCID: https://orcid.org/0000-0001-8008-6278)
- Zhongshan Xu (ORCID: https://orcid.org/0000-0003-3030-0381)
- Rongzheng Ding (ORCID: https://orcid.org/0000-0002-3976-3545)
- Guodong Zhao (ORCID: https://orcid.org/0000-0002-9920-8244)
- Yage Zhao (ORCID: https://orcid.org/0009-0001-7757-7487)
- Xiaona Zhu (ORCID: https://orcid.org/0000-0001-8305-8870)
- Qing Xie (ORCID: https://orcid.org/0009-0007-7957-3176)
Institutions
- Fudan University (CN)
- Shanghai Fudan Microelectronics (China) (CN)
Publication Details
- Published
- 2025-03-24
- DOI
- https://doi.org/10.1109/cstic64481.2025.11017831
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00