Effect Of Sputtering Paraments On The Surface Morphology And Electrical Properties Of Thin Film Resistors

In the field of integrated circuits, the electrical characteristics of resistors affect the performance of the whole circuit. Especially the temperature characteristics can cause instability in the output of the circuit. There have been many literatures to study the effect of different factors on the characteristics of resistors, but few literatures to study what influences these factors including the surface roughness of thin film resistors. In this paper, the effect of fabrication procedures on the surface topography of thin film is investigated. It is shown that changing fabrication procedures paraments can have a great influence on the thin film resistors (TFR). This research uncovers a novel pathway to strengthen the functionality of nanosized resistors.