A New Theory of High-K Electrode Material Versus Low-K Electrode Mterial for High-K Metal-Insulator-Metal Capacitors
In this paper, the author proposes his new theory that there are two kinds of electrode materials: high-k and low-k electrode materials. For example, RuO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>, IrO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> and SrRuO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> normally behave as conductors but can behave as high-k dielectric when depleted of free electrons. Metals normally behave as conductors but can behave as low-k dielectric when depleted of free electrons.
Authors
- W. S. Lau
Institutions
- Nanyang Technological University (SG)
Publication Details
- Published
- 2025-03-24
- DOI
- https://doi.org/10.1109/cstic64481.2025.11018041
- Primary Topic
- Copper Interconnects and Reliability
- Type
- article
- Field-Weighted Citation Impact
- 0.00