Optimization Directions and Solutions for AMHS in Large-Scale Semiconductor Fabs

With the growing global demand for advanced semiconductor chips, particularly in high-performance computing, 5G, automotive electronics, and IoT, GIGA fabs (ultra-large semiconductor fabrication plants) have emerged as a significant trend in the industry. These fabs leverage their immense production capacity, economies of scale, and advanced technologies. A key feature of GIGA fabs is their high level of automation, large-scale production, and complex technical requirements, which heavily rely on Automated Material Handling Systems (AMHS). The AMHS in GIGA fabs is not only critical to production efficiency but also plays a vital role in yield control, turnover efficiency, and is foundational to achieving intelligent manufacturing and Industry 4.0. Therefore, optimizing and innovating AMHS for GIGA fabs is a crucial direction for the semiconductor industry's future development. Historically, AMHS solutions in GIGA fabs were monopolized by DFK/MURATEC, but with the rise of domestic AMHS integrators, new innovations are emerging in the actual implementation of FAB projects. This paper presents the innovative designs proposed by HIMC in response to the challenges faced by AMHS systems in GIGA fabs. Key innovations include the AI-driven crane control and dispatching system, software-defined track and transportation control systems, and practical applications of digital twins.