Hydrogen-Free IBD IGZO Thin Films With Outstanding Thermal Stability And Improved Step Coverage

Ion beam deposition technology is used to fabricate IGZO thin films with excellent thermal stability. Additionally, XPS analysis was performed on IGZO thin film to analyze the absence of hydrogen, which affects the thermal stability of the films. Furthermore, XPS depth profiling revealed homogeneous IGZO thin films deposited by the ion beam deposition. Moreover, IGZO thin films were deposited on high-aspect-ratio trenches with an aspect ratio of 6:1, exhibiting improved step coverage and conformality. The film coverage was further optimized by adjusting the angle of the ion source during the deposition process.