Multi-channel enhanced high-precision 3D structured light measurement

This paper investigates a structured illumination microscopy method based on multi-channel information fusion (multi-channel information fusion structured illumination microscopy [MF-SIM]) to enhance the accuracy and stability of micro-nano 3D morphological measurements. The method utilizes multi-channel images captured by a color CCD and leverages the characteristics of different wavelengths corresponding to distinct focal planes to extract abundant modulation information from a single frame. By fusing multi-channel data, it effectively overcomes the vulnerability to noise interference caused by small gradients at the modulation peak in traditional single-channel systems. Numerical simulations and experimental results demonstrate that, compared to traditional structured illumination microscopy methods based on monochrome CCDs, the MF-SIM method exhibits significant advantages in measurement accuracy and repeatability.