Arrayed waveguide gratings in lithium tantalate integrated photonics

Arrayed waveguide gratings (AWGs) are widely used photonic components for splitting and combining different wavelengths of light. They play a key role in wavelength-division multiplexing (WDM) systems by enabling efficient routing of multiple data channels over a single optical fiber and as a building block for various optical signal processing, computing, imaging, and spectroscopic applications. Recently, there has been growing interest in integrating AWGs in ferroelectric material platforms, as the platform simultaneously provides efficient electro-optic modulation capability and thus holds the promise for fully integrated WDM transmitters. To date, several demonstrations have been made in the X-cut thin-film lithium niobate (LiNbO 3 ) platform, yet the large anisotropy of LiNbO 3 complicates the design and degrades the performance of the AWGs. To address this limitation, we use the recently developed photonic integrated circuits (PICs) based on thin-film lithium tantalate (LiTaO 3 ), a material with a similar Pockels coefficient as LiNbO 3 but significantly reduced optical anisotropy, as an alternative viable platform. In this work, we manufacture LiTaO 3 AWGs using deep ultraviolet lithography on a wafer scale. The fabricated AWGs feature a channel spacing of 100 GHz, an insertion loss of <4dB, and cross talk of <−14dB. The wafer-scale fabrication of these AWGs not only ensures uniformity and reproducibility, but also paves the way for realizing volume-manufactured integrated WDM transmitters in ferroelectric photonic integrated platforms.