Optical performances of near-infrared metalenses with process-induced defects
Defects are inevitably induced during the fabrication process of a metalens, which will affect the metalens's yield and optical performances.Thus, investigations on the fabrication defects are becoming increasingly important for the mass production of metalenses.In this Letter, the optical performances of near-infrared metalenses with four types of fabrication defects are investigated.The results show that the process-induced defects obviously affect the focusing efficiency at = 940 nm, but they have less impact on the quality of the focal spot.This work provides fabrication guidance for largescale manufacturing of metalenses in the future.
Authors
- Chenxu Zhu (ORCID: https://orcid.org/0009-0008-0044-1072)
- Shaonan Zheng (ORCID: https://orcid.org/0000-0003-4075-1012)
- Xingyan Zhao (ORCID: https://orcid.org/0000-0002-8743-7824)
- Qize Zhong (ORCID: https://orcid.org/0000-0003-2536-0080)
- Ruohui Chen (ORCID: https://orcid.org/0000-0001-8746-5350)
- Ting Hu (ORCID: https://orcid.org/0000-0002-7134-1748)
- Bo Cui (ORCID: https://orcid.org/0000-0003-3222-3826)
- Xiao-Fei Liu (ORCID: https://orcid.org/0009-0005-8678-4401)
- Yang Qiu (ORCID: https://orcid.org/0009-0007-6000-3835)
- Yuan Dong (ORCID: https://orcid.org/0000-0002-4024-0469)
- Yilin Lu (ORCID: https://orcid.org/0009-0007-0854-0940)
Institutions
- Shanghai University (CN)
- University of Waterloo (CA)
Publication Details
- Journal
- Chinese Optics Letters
- Published
- 2025-01-01
- DOI
- https://doi.org/10.3788/col202523.063602
- Citations
- 1
- Primary Topic
- Metamaterials and Metasurfaces Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.43
Funders
- National Natural Science Foundation of China