Bandwidth Expansion for Mode-Matched MEMS Gyroscopes Without Any Compensator

Bandwidth performance is critical for MEMS gyroscopes in high-dynamic applications. However, conventional compensator-based bandwidth expansion methods are limited by design complexity and sensitivity to gyroscope parameters. To address these challenges, this paper proposes a novel compensator-free bandwidth expansion strategy for mode-matched MEMS gyroscopes. By modeling the sense mode closed-loop system as a unity negative feedback system, we identify the forward gain as a critical factor based on the fact that the bandwidth is proportional to the gain crossover frequency. The expansion strategy involves three steps: first, determining the cutoff frequency of the low-pass filter in the demodulation stage; second, optimizing the forward gain by the Nyquist stability criterion; and third, tuning controller parameters to ensure optimal flatness across the bandwidth. Simulation and experimental results demonstrate bandwidth expansion from 14 Hz to 191 Hz and 15 Hz to 190 Hz, respectively, without compromising scale factor or bias noise. Moreover, the expansion scheme demonstrates strong robustness to variations in gyroscope parameters. Three gyroscope samples with varying drive frequencies and Q-factors achieved bandwidths of 190 Hz, 193 Hz, and 187 Hz under the same optimization parameters, demonstrating its practicality for engineering applications.

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Publication Details

Journal
IEEE Transactions on Instrumentation and Measurement
Published
2025-01-01
DOI
https://doi.org/10.1109/tim.2025.3572154
Citations
2
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
Field-Weighted Citation Impact
1.46
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article

Bandwidth Expansion for Mode-Matched MEMS Gyroscopes Without Any Compensator

Xuewen Liu, Xukai Ding, Hongsheng Li, Yang Shang et al.
2 citations
IEEE Transactions on Instrumentation and Measurement
Advanced MEMS and NEMS Technologies
1.46
article

Bandwidth Expansion for Mode-Matched MEMS Gyroscopes Without Any Compensator

Xuewen Liu, Xukai Ding, Hongsheng Li, Yang Shang, Wei Yu, Anlan Ding
article en
2 citations

Abstract

Bandwidth performance is critical for MEMS gyroscopes in high-dynamic applications. However, conventional compensator-based bandwidth expansion methods are limited by design complexity and sensitivity to gyroscope parameters. To address these challenges, this paper proposes a novel compensator-free bandwidth expansion strategy for mode-matched MEMS gyroscopes. By modeling the sense mode closed-loop system as a unity negative feedback system, we identify the forward gain as a critical factor based on the fact that the bandwidth is proportional to the gain crossover frequency. The expansion strategy involves three steps: first, determining the cutoff frequency of the low-pass filter in the demodulation stage; second, optimizing the forward gain by the Nyquist stability criterion; and third, tuning controller parameters to ensure optimal flatness across the bandwidth. Simulation and experimental results demonstrate bandwidth expansion from 14 Hz to 191 Hz and 15 Hz to 190 Hz, respectively, without compromising scale factor or bias noise. Moreover, the expansion scheme demonstrates strong robustness to variations in gyroscope parameters. Three gyroscope samples with varying drive frequencies and Q-factors achieved bandwidths of 190 Hz, 193 Hz, and 187 Hz under the same optimization parameters, demonstrating its practicality for engineering applications.

IEEE Transactions on Instrumentation and MeasurementVol. 74
Southeast University (CN)
Affordable and clean energy
Openalex Percentile: Top 17%
Advanced MEMS and NEMS Technologies
1.46
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