Aluminum-oxynitride-based advanced packaging, thermal management, and passivation coating

Aluminum Oxynitride (AlON) is a dielectric material that offers significant advantages for packaging of space-based electronics over other commonly used materials such as ceramics. When combined with modern, novel deposition methods, AlON thin films atomically bond directly to substrate materials (Cu, Al, etc.) with near 100% defect-free density. In this work, ALON based dielectric / Cu based packaging substrates were produced showing significant enhancements in voltage standoff, thermal conductivity, and lifespan versus more commonly used substrate materials. ALON, as the next generation packaging board substrates, has shown the first steps to fundamentally change the capabilities of in-space electronics to meet the needs of the most demanding applications.

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Publication Details

Published
2025-05-30
DOI
https://doi.org/10.1117/12.3066121
Primary Topic
Semiconductor materials and devices
Type
article
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article

Aluminum-oxynitride-based advanced packaging, thermal management, and passivation coating

Narasimha S. Prasad, Brian J. Soller, Jason Schmitt, Mehrdad Khosravi et al.
Semiconductor materials and devices
article

Aluminum-oxynitride-based advanced packaging, thermal management, and passivation coating

Narasimha S. Prasad, Brian J. Soller, Jason Schmitt, Mehrdad Khosravi, Clinton Whiteley
article en

Abstract

Aluminum Oxynitride (AlON) is a dielectric material that offers significant advantages for packaging of space-based electronics over other commonly used materials such as ceramics. When combined with modern, novel deposition methods, AlON thin films atomically bond directly to substrate materials (Cu, Al, etc.) with near 100% defect-free density. In this work, ALON based dielectric / Cu based packaging substrates were produced showing significant enhancements in voltage standoff, thermal conductivity, and lifespan versus more commonly used substrate materials. ALON, as the next generation packaging board substrates, has shown the first steps to fundamentally change the capabilities of in-space electronics to meet the needs of the most demanding applications.

Langley Research Center (US), Nitride Crystals (United States) (US)
Openalex Percentile: Top 90%
Semiconductor materials and devices
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