Multiplexed readout of superconducting qubits using a three-dimensional reentrant-cavity filter

Hardware-efficient methods for high-fidelity quantum state measurements are crucial for superconducting qubit experiments, as qubit numbers grow and feedback and state reset begin to be employed for quantum error correction. We present a three-dimensional reentrant-cavity filter designed for frequency-multiplexed readout of superconducting qubits. The cavity filter is situated out of the plane of the qubit circuit and capacitively couples to an array of on-chip readout resonators in a manner that can scale to large qubit arrays. The reentrant cavity functions as a large-linewidth bandpass filter with intrinsic Purcell filtering. We demonstrate the concept with a four-qubit multiplexed device in which we achieve an average readout fidelity of 98.6% and measurement-induced crosstalk dephasing rates below 0.15 kHz.