Research on Nonlinear Calibration and Temperature Compensation Methods for Silicon Strain Gauge Pressure Sensors

The performance of pressure sensors is prone to be influenced by temperature variations, causing zero-point temperature drift and sensitivity temperature drift and thereby increasing the error of measurement results. Based on the temperature error analysis of silicon piezoresistive pressure sensors, a cubic spline interpolation hybrid algorithm based on the JHM1400F chip is proposed for compensating the temperature error. The results indicate that this method features high compensation accuracy and good stability, effectively suppressing the temperature drift.