A Wide-Range Graphene Flexible Pressure Sensor Based on MEMS Process

Flexible pressure sensors have garnered significant attention in the semiconductor industry since their inception and have found extensive applications in aerospace, artificial intelligence, automotive, and wearable technology sectors. Currently, most of the preparation methods for these sensors rely on chemical processes, often with a measurement range of less than 100 kPa, and complicate the standardization of the manufacturing process. This paper introduces a novel method for fabricating graphene-based flexible pressure sensors using MEMS technology. The fabricated sensor, composed of flexible materials, exhibits excellent bendability. Each sensor has a design dimension of 1.5x1.5 cm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup>. To investigate the sensor's measurement range, tests conducted with a vacuum pressure gauge revealed that the sensor can measure pressures up to 150 kPa. Additionally, the sensor demonstrates a response time of 100 milliseconds and exhibits good repeatability. Utilizing MEMS processes ensures consistent electrical characteristics across fabricated sensors, indicating potential for large-scale manufacturing. This approach offers a promising new direction for the development of graphene-based flexible pressure sensors.