Gallium Nitride Gate-All-Around Macaroni Field Effect Transistor (GaN-GAA-MCFET): Biosensor for DNA detection

The Gallium Nitride Gate-All-Around Macaroni Field Effect Transistor (GaN-GAA-MCFET), a novel Dielectric Modulated Biosensor specifically engineered for DNA detection, is presented in this paper. The primary objective of gallium nitride semiconductor-based FET biosensor is to improve biosensing performance by combining several device engineering techniques such as channel engineering by using macaroni channel, split gate, and oxide engineering. Three split gates are deployed for gate engineering, and the Al<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>O<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>+HfO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> stack has been utilized during oxide engineering. The GaN-GAA-MCFET biosensor has two nanocavities which are formed by etching the complete metal and layer of HfO2 in a specific region to make open cavities to boost structural stability and detection sensitivity. For the DNA biomarkers, the proposed design offers an appealing threshold voltage sensitivity in contrast to the several other devices found in the literature.