High-K, Gate-Stack Engineered, Junctionless, Nanowire Ferroelectric Field Effect Transistor (J-NW-Fe-Fet) with various catalytic metals for PH3 Sensing Applications

In order to detect phosphine (PH<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf>) gas, this script proposed a Junctionless-Nanowire-Ferroelectric Field Effect Transistor (J-NW-Fe-Fet) to detect phosphine gas for low-power and high sensitive based applications. In order to lower the sub-threshold swing below 60 mV/decade, the ferroelectric layer of Si:HfO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> has been employed as a stack, based on the negative capacitance phenomena. Furthermore, three catalytic metals- Chromium (Cr), Iridium (Ir), and Rhodium (Rh) as gate electrodes have been employed to build the J-NW-Fe-Fet as a phosphine gas sensor. Several electrical characteristics, such as potential and electron concentration, have been investigated in the design of the PH<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> gas sensor. Additionally, variations in drain-current (I<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ds</inf>), trans-conductance (g<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">m</inf>), and output-conductance (g<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">d</inf>), are simulated for various catalytic metals at different channel lengths (L= 30 nm, 40 nm & 50 nm) at the gate electrode in order to evaluate the sensor's performance. The ATLAS 3-D simulator has been used to carry out the simulations.