Quartz Crystal Piezoelectric Resonant Force Sensors

成功以方型石英谐振式晶体作为力学传感器敏感单元芯片，使用金属封装结构进行环境隔离，验证并提高其精度、灵敏度、线性、重复性與降低迟滞等特性；在可靠度方面，也验证了环境温湿度、气密性、力学疲劳、掉落与振动等可靠度与稳定性，可大量应用于机器人、新能源车、航天航空与智能制造等产业。Successfully used the square quartz resonant crystal as the sensor head chip of the force sensors. Using a metal package structure for environmental isolation. Verify and improve its accuracy, sensitivity, linearity, repeatability, and hysteresis reduction characteristics. In terms of reliability, the reliability and stability of environmental temperature and humidity, air tightness, mechanical fatigue, drop and vibration are also verified. It can be widely used in robots, new energy vehicles, aerospace and intelligent manufacturing industries.