Fabrication of Patterned Magnetic Nanofilms and their Electrical and Thermal Transport Properties

As microelectronic devices continue to scale down to the nanoscale, the electrical and thermal transport properties of nanofilms have garnered increasing attention. In this study, suspended nickel nanofilms with patterned arrays of square, circular, and triangular protrusions were successfully fabricated using MEMS technology in combination with electron-beam lithography. Investigations into their electrical and thermal transport characteristics revealed the following unique properties: (i) within the temperature range of 9–300[Formula: see text]K, the film resistivity initially increased gradually, followed by a linear rise as the temperature increased; (ii) magnetoresistance measurements showed significantly stronger effects under parallel magnetic fields compared to perpendicular ones, with the latter displaying double-peak characteristics during magnetic field sweeps and temperature-dependent peak positions; (iii) the maximum thermal conductivity of the films reached only about one-third that of bulk nickel, showing an initial rapid increase followed by saturation as the temperature rose. This work highlights the regulatory influence of patterned structures on the electrical and thermal transport behaviors of magnetic nanofilms, providing valuable insights for the design of microelectronic devices.