Back-Gate Bias-Controllable Subthreshold Slope of Junctionless Transistors

Junctionless transistors (JLTs) are one of the next-generation logic transistors for sub-3-nm technology nodes with several advantages, including very simple structure, no p-n junctions at source and drain, and bulk conduction-based operation. In this work, back-gate voltage (<italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>gb</roman></sub>) influenced subthreshold conduction mechanism of JLTs was investigated in detail. The subthreshold swing (SS) in JLTs was clearly improved with applying a negative <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>gb</roman></sub>, since the effective channel thickness of JLT was controlled by <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">V</i><sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><roman>gb</roman></sub>. The experimental results were verified by analytical model equations and numerical simulation. Those results provide a key information for developing low-power and energy-efficient applications with JLTs.