Arc detection algorithm using Photo Multiplier Tubes
This paper presents an advanced algorithmic framework for enhanced detection of high-voltage discharge events (arcs) through photomultiplier tube (PMT) signal analysis, demonstrating substantial improvements in critical arc event classification and yield preservation. Arc detection accuracy is paramount for process control and equipment integrity in plasma-based semiconductor manufacturing. This optimization is especially critical as feature densities increase and critical dimensions decrease in advanced node semiconductor fabrication.
Authors
- Minjun Kwak
- Jaeseok Park (ORCID: https://orcid.org/0000-0002-8390-8166)
- Jae-Yong Park (ORCID: https://orcid.org/0000-0002-1088-3930)
- Chulhong Kim (ORCID: https://orcid.org/0000-0001-7249-1257)
- Young-Hoon Kim (ORCID: https://orcid.org/0000-0003-0265-3825)
- Jungmin Lee (ORCID: https://orcid.org/0000-0002-5194-8470)
- Sarah Kim (ORCID: https://orcid.org/0000-0001-9509-7578)
- Sunjung Kim (ORCID: https://orcid.org/0000-0002-5441-8985)
- Myung-Geun Song (ORCID: https://orcid.org/0009-0004-6402-413X)
- H. S. Kim
Institutions
- Samsung (South Korea) (KR)
Publication Details
- Published
- 2025-05-05
- DOI
- https://doi.org/10.1109/asmc64512.2025.11010804
- Primary Topic
- Ocular and Laser Science Research
- Type
- article
- Field-Weighted Citation Impact
- 0.00