Implementation & Application of coherent control systems: Digital Twin (high frequency open loop) with R2R (low frequency closed loop)

A Digital Twin (Applied Twin™) is a computational model that represents a physical asset such as a process chamber, evolving over time to reflect its structure, behavior, and context. This model treats the asset-twin system as a set of coupled dynamical systems that evolve over time, interacting through observed data and control inputs. [1] They are an evolution of modeling & simulation. The Digital Twin (DT) can be useful in integration, testing, monitoring, and maintenance. Eventually it can be utilized as an early and ad hoc fast learning tool for systems and processes. In semiconductor manufacturing, DTs have found their way in their early rudimentary form as control or predictive applications such as for production control applications like planning, scheduling, and dispatching and for equipment and process control applications like, Run-to-Run (Applied SmartFactory™ Run-2-Run) (R2R), Virtual Metrology, and predictive maintenance. Through this paper we explore the idea of idea of engineering DT and R2R algorithms with intersecting system manipulated variables or inputs between the two systems.