Using Machine Vision for Fault Detection of Dry Resist Top Film Peeling : Topic/category: Advanced Process Control

While peeling the polyethylene film off a dry film resist, a common fault is that the film tears and some of the film remains on the wafer. Such a fault is often not identified by existing tool sensors so that costly and time-consuming visual verification and/or macro-inspection metrology must be used. This paper discusses a fault detection approach which uses a low-cost video stream along with machine vision technology to identify peeler faults. Furthermore, machine vision is used to infer tool events so that process sensorization and robust fault detection is possible without extensive and risky equipment integration.