Enhancing Particle Performance in Plasma-Resist-Stripping Machines through Pressure Relief Valve Assembly Relocation

Pressure relief valve is installed in dry resist-stripping machine to ensure system pressure does not exceed allowable limit to prevent component failures from excessive pressure. Despite its function as a gateway providing protection from machine overpressure, the mechanism of releasing pressure from high-pressure system causes turbulence. In dry resist-stripping machine, the pressure relief valve is located on the process chamber body. This design eventually causes particle contamination to the chamber parts due to the turbulence. This paper will elaborate on the design modification of pressure relief valve in resist stripping machine to improve its particle performance.