The utilization of mathematical trends to characterize equipment manipulation at process temperature for leveling a CVD film

Hot leveling is a mechanical process to improve the uniformity of a chemical vapor deposition (CVD) film. The current process is subjective and time consuming. This paper discusses the development of a mathematical model that represents the inside of the chamber which in turn gives the ability to create an innovative calculator for the hot leveling process. The calculator system will be integrated into a streamlined user interface for quick use by fab equipment technicians. The benefits of using this web-based calculator system will result in the improved quality of CVD films, a decrease in manpower hours working on the hot leveling process, and an increase in tool availability when recovering from maintenance.