MEMS-based bidirectional scanning method with phase compensation

Fringe projection profilometry (FPP), as a non-contact, high-resolution structured light method, has its accuracy influenced by the quality of the projected fringes. Addressing the projection end requirements of FPP, MEMS scanning mirrors, compared to DLP technology, offer advantages in terms of smaller size, faster scanning speed, and lower cost. However, MEMS scanning mirrors driven by electrostatic force face the issue of hysteresis deviation, which significantly reduces the signal-to-noise ratio in high-frequency fringes. This paper proposes a quantitative method for testing hysteresis deviation and analyzing its impact on phase. By implementing compensation, this method effectively resolves the issue, reducing the deviation to 10%, thereby providing data support for the effective utilization of bidirectional scanning.