Meeting the Metrology Needs of the Electronic Device Failure Analysis Technology Roadmap

Abstract In 2023, the CHIPS Metrology Program was stood up to support the CHIPS Act’s provision for NIST to establish a metrology program that will strengthen the U.S. semiconductor industry through multidisciplinary research and development efforts. Metrology is needed to benchmark, control, and improve manufacturing processes, and plays a crucial role in semiconductor manufacturing. This article describes the four initiatives aligned to support the EDFAS community: its R&D portfolio, the CHIPS Metrology Small Business Innovation Research (SBIR) program, the CHIPS Metrology Community, and the Metrology to Innovate in Semiconductors (METIS) data exchange.