A Novel Ion Microscope for High-Resolution Ion Imaging and SIMS Nanoanalytics with Precise Sample Navigation

Abstract This article presents a novel ion microscope system combining high-resolution ion imaging with secondary ion mass spectrometry (SIMS) and precise laser interferometer-controlled sample navigation. The system features a liquid metal alloy ion source that emits multiple ion species, allowing quick switching between heavy ions for delayering and lighter ions for high-resolution imaging below 20 nm. The technology demonstrates advanced capabilities in 3D nano-reconstruction, correlative imaging, and elemental mapping, making it valuable for microelectronics failure analysis and process control applications.