Tribology of ZrC Coatings and Spherical Tips Acquired with Extraordinarily Stiff, Metal Atomic Force Microscopy Probes

Friction and wear are among the most crucial limiting factors for micro‐electro‐mechanical systems reliability. In this article, it introduces a novel approach to microtribological research by developing ultrastiff atomic force microscopy (AFM) probes capable of applying millinewton‐range normal loads. This innovation enables friction measurements in operational ranges relevant to microbearings, overcoming limitations of conventional AFM probes. This article investigates the tribological performance of zirconium carbide (ZrC) coatings, fabricated via physical vapor deposition sputtering, in combination with various microspherical counterfaces. Its findings reveal that ZrC coatings with high carbon content exhibit coefficient of friction as low as 0.08 when paired with borosilicate glass. Additionally, it provides insights into wear behavior, advancing the selection of tribo‐pairs for next‐generation microbearings.