Micro-Cantilever Capacitive Sensor for Magnetic Field Measurement

From motor control to navigation systems, the accurate measurement of magnetic fields provides essential information for a variety of applications, and the development and application of magnetic field sensors has become one of the research areas of interest in the field of electrical engineering. With the development of technology and the diversification of application scenarios, the traditional magnetic field sensors based on the principles of Hall effect, magnetoresistive effect, etc. have shown their limitations in terms of high accuracy, miniaturization, and high sensitivity. In order to meet the needs of emerging applications, this paper proposes a micro-cantilever capacitive based magnetic field measurement sensor structure. The structure changes the capacitance of the cavity in the sensor by the vibration of the cantilever beam under the magnetic field, thus realizing the measurement of the magnetic field. We simulated the designed sensor using COMSOL Multiphysics software and the results show that the sensor has good magnetic field response and can be extended to industrial applications in power grids.