Volume manufacturing of thin-film lithium niobate modulators with bandwidth <i>&gt;</i> 110 GHz based on 4-inch wafer with a quartz handle Authors Xi Xiao Daigao Chen Zihan Zhou (ORCID: https://orcid.org/0000-0002-8524-1000) Qiansheng Wang (ORCID: https://orcid.org/0000-0002-5548-7325) Dong Wang (ORCID: https://orcid.org/0000-0003-0634-953X) Ye Liu (ORCID: https://orcid.org/0000-0002-5863-1820) Lei Wang (ORCID: https://orcid.org/0000-0002-9522-3623) Changqing Wang (ORCID: https://orcid.org/0000-0001-9807-3045) Peiqi Zhou Yang Liu (ORCID: https://orcid.org/0009-0004-6823-3086) Publication Details Journal Light Advanced Manufacturing Published 2025-01-01 DOI https://doi.org/10.37188/lam.2025.047 Primary Topic Photonic and Optical Devices Type article Field-Weighted Citation Impact 0.00 Funders National Key Research and Development Program of China Explore the Global Research Space Interactive Map