Reduced Shell Model for the Simulation of Crosstalk in Piezoelectric Micromachined Ultrasound Transducer Arrays

Piezoelectric micromachined ultrasonic transducers (PMUTs) offer a promising approach for generating ultrasonic waves across various applications. Typically utilized in large arrays, this poses significant challenges on design and simulation, particularly if crosstalk induced by surface acoustic waves (SAWs) are to be modeled, leading to extensive computation times and a large amount of random-access memory needed. To overcome these challenges, we developed a Finite Element Method (FEM)-based shell model of a PMUT cell, which we benchmarked against an FEM solid model. This shell model significantly reduces simulation time while maintaining high accuracy in predicting sound radiation, eigenfrequency and inplane stress. When applied to large arrays, this model enables the exploration of acoustic radiation with phase-varied arrays and the mutual interactions of PMUT cells through surface acoustic waves.