An In-Package EMC-Based Relative Humidity Sensor

This paper presents a novel in-package relative humidity (RH) sensor designed to enhance moisture detection within the chip encapsulation material, specifically epoxy molding compound (EMC). Traditional methods for assessing EMC moisture content, such as mass measurements, are time-consuming and incompatible with industrial reliability tests, limiting their use for real-time, in-situ monitoring. To address these challenges, we propose an integrated capacitive sensor that directly measures moisture content within the encapsulation material. The sensor utilizes a heterogeneous electrode design to overcome the sensitivity limitations of conventional interdigital electrodes (IDEs). This design features sections of different widths, allowing selective wet chemical etching of the silicon dioxide layer using buffered hydrofluoric acid (BHF). By controlling the etching time, the silicon dioxide layer beneath the narrower sections is completely etched, while oxide pillars form under the wider sections, resulting in semi-floating electrodes. The EMC fills the etched regions and wraps around the narrower sections, concentrating more electric field lines in the EMC and enhancing sensor sensitivity. Our proposed sensor achieves a capacitance change of 1 pF per 80 % RH, improving sensitivity from 6.9 to 12.3 fF/%RH, with a 20 % increase in relative capacitance change. A shielding layer is added to minimize parasitic capacitance effects, ensuring accurate measurements. The proposed sensor is fully CMOS-compatible and can monitor moisture-induced reliability risks, as well as assess packaging material aging. This work provides a cost-effective and reliable solution for in-package humidity monitoring in semiconductor applications.