Modeling and Simulation of Cmut and Pmut Ultrasound Transducers and Package Using a Multiphysics Approach

Ultrasound transducers have diverse applications in medical imaging, consumer electronics, and automotive industries, offering advantages such as non-invasive medical imaging, reliable and non-mechanical transduction of input signals. Micro-Electro-Mechanical Systems (MEMS) based ultrasound transducer solutions, including Piezoelectric Micromachined Ultrasound Transducer (PMUT) and Capacitive Micromachined Ultrasound Transducer (CMUT) devices, exhibit superior performance compared to traditional piezo-ceramic based solutions due to their low cost, compact design, high efficiency and wideband operation capability, furthermore monolithic integration with electronics is possible. However, the development of these cutting-edge technologies requires sophisticated simulation tools to understand and manipulate the underlying ultrasound physics, which is essential for engineering applications. The newly developed simulation methodology will be utilized to model three-dimensional arrays of CMUT and PMUT cells. Simulations are performed on cutting-edge designs of Infineon-developed chips using the Quanscient Allsolve software. The results obtained through resonance frequency measurements on PMUT devices and CMUT devices will be evaluated and compared with the simulation results obtained using the presented methodology. Additional capabilities on building ultrasound simulation models with multiphysics is elaborated in this work and demonstrated. Projections for further development in the simulation environment are also presented.