A Dual-Region MEMS Thermal Flow Sensor with Obstacle-Enhanced Sensitivity and Linearity Across Wide Velocity Ranges

This paper introduces a novel MEMS-based thermal flow sensor designed for high sensitivity and linearity across a wide range of gas flow velocities. The sensor incorporates a single microheater and two pairs of thermistors symmetrically arranged around the heater, with strategically placed obstacles to enhance performance. To ensure accuracy under varying flow conditions, the sensor is divided into two functional regions: one optimized for low flow velocities (0–1 m/s) and the other for high flow velocities (1–6 m/s). Simulations conducted using COMSOL Multiphysics reveal that including obstacles improves heat transfer and increases the interaction time between the heated surface and the flow, particularly in the high-flow region. In the low-flow regime, the sensor achieves a sensitivity of 2.5 SK/m with 91% linearity. In contrast, in the high-flow regime, the sensitivity increases to 6.5 SK/m with similarly high linearity. This dual-region design highlights the sensor’s versatility in handling a broad range of flow velocities, making it suitable for applications in medical, industrial, and environmental monitoring. These findings underscore the advantages of the dual-region design and obstacle integration, providing a robust solution for accurate flow measurement under diverse operating conditions.