Spatial Mapping of Intrinsic and Readout Nonlinearities in a Strongly Driven Micromechanical Membrane

Recently, it was shown that strongly driven micromechanical resonators show mode shapes that strongly differ from the eigenmodes [F. Yang et al., Spatial modulation of nonlinear flexural vibrations of membrane resonators, Phys. Rev. Lett. 122, 154301 (2019)PRLTAO0031-900710.1103/PhysRevLett.122.154301]. This raises the question of the origin of this nonlinear behavior. We measure the spatial dependence of the nonlinearities of high-stress micromechanical membranes. The mechanical nonlinearity is determined from the frequency response and is found to be independent of the probing location. It is the phase of the response that is instrumental in extracting that intrinsic nonlinearity. Our interferometric readout results in high-harmonics generation. These harmonics have a clear spatial profile that shows ringlike patterns resembling previous reports. These patterns are reproduced by a model of the displacement-dependent reflection signal in combination with motion amplitudes of the same order as the probing wavelength.