Nano-g resolution optical fiber MEMS accelerometer with symmetric push-pull spring structure
A fiber-optic MEMS accelerometer based on a symmetric push-pull spring structure made by micromachining on a silicon substrate is presented, which combines the advantages of low noise, high sensitivity, and large operation bandwidth compared with existing fiber-optic MEMS accelerometers. Experimental results show that the accelerometer achieves a sensitivity of 47.1 dB re rad/g (226.2 rad/g) and a noise floor as low as 10 ng/Hz<sup>1/2</sup> indicating that it has a nano-g resolution.
Authors
- Jiajing He (ORCID: https://orcid.org/0000-0002-6477-1061)
- Zexi Liu (ORCID: https://orcid.org/0009-0003-8221-4829)
- Haiwen Cai (ORCID: https://orcid.org/0000-0003-1122-1063)
- Kan Gao (ORCID: https://orcid.org/0000-0001-8016-5013)
- Haoyang Pi
- Yanguang Sun
- Qing Ye (ORCID: https://orcid.org/0000-0002-3835-0829)
Institutions
- Chinese Academy of Sciences (CN)
- Shanghai Zhangjiang Laboratory (CN)
- Shanghai Institute of Optics and Fine Mechanics (CN)
- University of Chinese Academy of Sciences (CN)
Publication Details
- Published
- 2025-05-22
- DOI
- https://doi.org/10.1117/12.3061068
- Primary Topic
- Advanced Fiber Optic Sensors
- Type
- article
- Field-Weighted Citation Impact
- 0.00