Analyzing the laser-driven dynamics of SU-8 microcantilevers with optical fiber Fabry-Perot cavity

In this paper, we first theoretically study the behavior of an SU-8 microcantilever under thermoelastic effects, secondly, the device fabrication was carried out using optical lithography. The cantilevers, with thicknesses of 78 μm, width of 340 μm and, a length of 1068 μm, were fabricated from SU-8. Experimental verification of thermoelastic excitation was conducted using a 450nm laser, and the behavior of the microcantilever dimension changes was analyzed using an optical Fabry-Perot cavity. In this configuration, the cantilever acts as a low reflecting mirror within a Fabry-Perot cavity. The experimental results show a displacement of approximately 860 nm, which is in good agreement with our simulation.