Ultra-miniature optical fiber accelerometer based on a 3D microprinted proof mass-integrated Fabry-Pérot micro-interferometer

We present an ultraminiature optical fiber accelerometer based on a micrometer-scale fiber-top Fabry-Pérot (FP) microinterferometer. An in-situ 3D microprinting technology is applied to directly print a proof mass-integrated FP microinterferometer on the end face of a single-mode optical fiber. The acceleration-induced change in the cavity length of the FP microinterferometer is demodulated by a laser interferometric readout scheme. Experimental results revealed that such an ultraminiature optical fiber optomechanical accelerometer can achieve not only a wide bandwidth with a flat frequency response of up to 10 kHz but also a low limit of detection, i.e., a noise-equivalent acceleration of 145.05 μg/√Hz.