Chemical Identification of Foreign Matters in a Cavity Using Submicron Infrared Spectroscopy
The novel submicron infrared (O-PTIR) has successfully demonstrated non-contact identification analysis of contamination particles, which adhere to the side wall of a single through-hole in a memory module without physical extraction.
Authors
- Naoki Baden (ORCID: https://orcid.org/0000-0002-9248-9899)
- Hanae Kobayashi (ORCID: https://orcid.org/0000-0003-1226-0742)
- Norio Urayama
- Michael Lo (ORCID: https://orcid.org/0000-0002-9549-137X)
Publication Details
- Published
- 2025-04-15
- DOI
- https://doi.org/10.23919/icep-iaac64884.2025.11002875
- Primary Topic
- Water Quality Monitoring and Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.00