High-Precision Thin-Film Bending Sensor with Fully Sliding Packaging Structure for Robotic Surgical Endoscope

Accurate real-time tracking of the posture of catheters and endoscopes is essential for maintaining surgical precision and ensuring patient safety during minimally invasive and interventional procedures. In order to overcome the challenges of high sensitivity, durability, and practicality under extreme bending conditions, we developed a high-precision bending sensor using 5 µm ultra-thin silicon integrated onto a tough polyimide substrate. The sensor is packaged in a dual-layer, silicone oil-filled package, offering excellent flexibility, environmental resilience, and good linearity. It can accurately detect curvature and diameter changes in endoscopes, even under extreme bending and fluctuating conditions. With reliable performance in high-humidity, fluid-exposed environments, this sensor provides an effective and practical solution for real-time posture monitoring in surgical applications, enhancing both safety and precision.