Research on Leakage Loss Suppression of Asymmetric Groove Sub Wavelength Grating Waveguides on Substrate

目前基于绝缘体上硅基波导器件已经被大量的研发并投入实际生活使用，随着制造水平的不断提高，亚波长光栅波导已经成为研究热点。但是亚波长光栅波导的衬底泄露损耗较大，限制了其应用。本工作仿真设计了非对称的含槽亚波长光栅波导，利用结构的非对称性，可以缓解直的以及弯曲的含槽亚波长光栅波导的衬底泄露损耗。本文工作可为绝缘体上硅基光学器件的研发和应用奠定基础。At present, silicon-based waveguide devices based on insulators have been developed and put into practical use, and with the continuous improvement of manufacturing level, subwavelength grating waveguides have become a research hotspot. However, the substrate leakage loss of subwavelength grating waveguides is large, which limits their application. In this work, an asymmetrical slotted subwavelength grating waveguide is designed, and the asymmetry of the structure can be used to alleviate the substrate leakage loss of straight and curved slotted subwavelength grating waveguides. This work can lay a foundation for the development and application of silicon-based optical devices on insulators.