Research on the Optimization of Resonance Line Shape of Silicon-Based Micro Ring Resonators Based on Phase Control

在光子集成电路中，微环谐振器微环谐振器是关键的光学器件，其共振特性对传感、滤波和开关等应用至关重要。本文研究了基于相位调控的方法来优化硅基微环谐振器微环谐振器的共振线型，实现从洛伦兹线型向Fano共振的可调转换。采用传输矩阵方法分析了相位单元(圆孔、椭圆孔和T形波导)对微环相位的影响，并结合FDTD仿真计算不同结构对相位变化的调控能力。研究表明，T形波导相较于传统孔洞结构在相位调制方面具有更优的性能。同时，对比条波导微环和亚波长光栅微环的相位调控特性，发现亚波长光栅微环对单个相位单元的敏感性较弱，不易实现有效的相位调控。本研究为优化微环谐振器的谐振特性提供了理论指导，并为高性能光学器件的设计提供了可行方案。In photonic integrated circuits, the micro ring resonator serves as a pivotal optical component, with its resonant characteristics being crucial for applications such as sensing, filtering, and switching. This paper delves into optimizing the resonant linewidth of silicon-based micro ring resonators through a phase-tuning approach, enabling adjustable transitions from Lorentzian linewidth to Fano resonance. We utilize the transfer matrix method to analyze the impact of phase cells (circular holes, elliptical holes, and T-shaped waveguides) on the phase of the micro ring, complemented by FDTD simulations to assess the phase modulation capabilities of various structures. Our findings reveal that T-shaped waveguides outperform traditional hole structures in terms of phase modulation. Additionally, when comparing the phase control characteristics of strip waveguide micro rings and subwavelength grating micro rings, we observe that subwavelength grating micro rings exhibit weaker sensitivity to individual phase cells, making effective phase modulation more challenging to achieve. This study provides theoretical guidance for optimizing the resonant characteristics of micro ring resonators and offers viable solutions for designing high-performance optical devices.